Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. 3D nanometrology of transparent objects by phase calibration of a basic bright-field microscope for multiple illumination apertures
 
research article

3D nanometrology of transparent objects by phase calibration of a basic bright-field microscope for multiple illumination apertures

Migliozzi, Daniel  
•
Zhao, B.
•
Gijs, Martinus  
September 14, 2020
Optics Express

Optical retrieval of the structure of transparent objects at the nanoscale requires adapted techniques capable of probing their interaction with light. Here, we considered a method based on calibration of the defocusing with partially coherent illumination and explored its phase retrieval capability over a wide range of illumination angles. We imaged: (1) commercial dielectric nanospheres to assess the phase calibration when measured along the optical axis,(2) custom-made nano-steps micropatterned in a glass substrate to assess the phase calibration when measured along the transversal axis, and (3) human cancer cells deposited on a glass substrate to assess the results of the calibration on complex transparent 3-dimensional samples. We first verified the model prediction in the spatial frequency domain and subsequently obtained a consistent and linear phase-calibration for illumination numerical apertures ranging from 0.1 to0.5. Finally, we studied the dependence of the phase retrieval of a complex nanostructured object on the illumination aperture.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

oe-28-20-28882.pdf

Type

Publisher's Version

Version

Published version

Access type

openaccess

License Condition

Copyright

Size

4.92 MB

Format

Adobe PDF

Checksum (MD5)

a558ad9d1b8442e46d8d2982180a43d5

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés