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  4. 3D nanometrology of transparent objects by phase calibration of a basic bright-field microscope for multiple illumination apertures
 
research article

3D nanometrology of transparent objects by phase calibration of a basic bright-field microscope for multiple illumination apertures

Migliozzi, Daniel  
•
Zhao, B.
•
Gijs, Martinus  
September 14, 2020
Optics Express

Optical retrieval of the structure of transparent objects at the nanoscale requires adapted techniques capable of probing their interaction with light. Here, we considered a method based on calibration of the defocusing with partially coherent illumination and explored its phase retrieval capability over a wide range of illumination angles. We imaged: (1) commercial dielectric nanospheres to assess the phase calibration when measured along the optical axis,(2) custom-made nano-steps micropatterned in a glass substrate to assess the phase calibration when measured along the transversal axis, and (3) human cancer cells deposited on a glass substrate to assess the results of the calibration on complex transparent 3-dimensional samples. We first verified the model prediction in the spatial frequency domain and subsequently obtained a consistent and linear phase-calibration for illumination numerical apertures ranging from 0.1 to0.5. Finally, we studied the dependence of the phase retrieval of a complex nanostructured object on the illumination aperture.

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Type
research article
DOI
10.1364/OE.404240
Author(s)
Migliozzi, Daniel  
Zhao, B.
Gijs, Martinus  
Date Issued

2020-09-14

Published in
Optics Express
Volume

28

Issue

20

Article Number

28882

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS2  
Available on Infoscience
November 10, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/173295
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