Low-Cost Readout Electronics for Piezoresistive MEMS-Based Transducers

The designs fabrication and testing of low-cost readout electronics for piezoresistive MEMS-based transducers are presented in this paper. The proposed circuit architecture has a low input referred noise power spectral density of 60nV/root Hz a latency of 2.5 mu s and provides offset compensation with a resolution of 72 mu V for piezoresistive MEMS-based transducers such as microcantilevers and micromembranes. Measurement results performed with a microcantilever used for force measurements and a micromembrane used for pressure measurements show the excellent performance of the proposed readout electronics for a frequency range from 10Hz to 9.6kHz.


Published in:
2019 Ieee International Instrumentation And Measurement Technology Conference (I2Mtc), 1597-1601
Presented at:
IEEE International Instrumentation and Measurement Technology Conference (I2MTC), Auckland, NEW ZEALAND, May 20-23, 2019
Year:
Jan 01 2019
Publisher:
New York, IEEE
ISSN:
1091-5281
ISBN:
978-1-5386-3460-8
Laboratories:




 Record created 2020-10-01, last modified 2020-10-29


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)