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  4. Low-Cost Readout Electronics for Piezoresistive MEMS-Based Transducers
 
conference paper

Low-Cost Readout Electronics for Piezoresistive MEMS-Based Transducers

Barrettino, Diego  
•
Ferreira, Denis
•
Mattavelli, Marco  
January 1, 2019
2019 Ieee International Instrumentation And Measurement Technology Conference (I2Mtc)
IEEE International Instrumentation and Measurement Technology Conference (I2MTC)

The designs fabrication and testing of low-cost readout electronics for piezoresistive MEMS-based transducers are presented in this paper. The proposed circuit architecture has a low input referred noise power spectral density of 60nV/root Hz a latency of 2.5 mu s and provides offset compensation with a resolution of 72 mu V for piezoresistive MEMS-based transducers such as microcantilevers and micromembranes. Measurement results performed with a microcantilever used for force measurements and a micromembrane used for pressure measurements show the excellent performance of the proposed readout electronics for a frequency range from 10Hz to 9.6kHz.

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