Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes

research article

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April 5, 2020

Name

1-s2.0-S0925963520300406-main.pdf

Type

Publisher's Version

Version

http://purl.org/coar/version/c_970fb48d4fbd8a85

Access type

openaccess

License Condition

CC BY

Size

2.46 MB

Format

Adobe PDF

Checksum (MD5)

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