Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes
2020
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Title
Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes
Author(s)
Toros, Adrien ; Kiss, Marcell Kristof ; Graziosi, Teodoro ; Mi, Sichen ; Berrazouane, R. ; Naamoun, M. ; Vukajlovic Plestina, J. ; Gallo, P. ; Quack, Niels
Published in
Diamond and Related Materials
Pages
107839
Date
2020-04-05
Note
This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution.
Other identifier(s)
DOI: https://doi.org/10.1016/j.diamond.2020.107839
Laboratories
Q-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2020-08-24