research article
Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes
April 5, 2020
Type
research article
Author(s)
Berrazouane, R.
Naamoun, M.
Vukajlovic Plestina, J.
Gallo, P.
Date Issued
2020-04-05
Published in
Article Number
107839
Note
This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution.
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
August 24, 2020
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