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research article
Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content
Type
research article
Web of Science ID
WOS:000437066400002
Authors
Mertin, S
•
Heinz, B
•
Rattunde, O
•
Christmann, G
•
Dubois, MA
•
Nicolay, S
•
Muralt, P
Publication date
2018
Published in
Volume
343
Start page
2
End page
6
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
November 8, 2018
Use this identifier to reference this record