research article
Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content
Type
research article
Web of Science ID
WOS:000437066400002
Author(s)
Mertin, S
Heinz, B
Rattunde, O
Christmann, G
Dubois, MA
Nicolay, S
Muralt, P
Date Issued
2018
Published in
Volume
343
Start page
2
End page
6
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
November 8, 2018
Use this identifier to reference this record