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  4. A High-PDE, Backside-Illuminated SPAD in 65/40-nm 3D IC CMOS Pixel With Cascoded Passive Quenching and Active Recharge
 
research article

A High-PDE, Backside-Illuminated SPAD in 65/40-nm 3D IC CMOS Pixel With Cascoded Passive Quenching and Active Recharge

Lindner, Scott  
•
Pellegrini, Sara
•
Henrion, Yann
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September 22, 2017
IEEE Electron Device Letters

We present a complete pixel based on a single-photon avalanche diode (SPAD) fabricated in a backside-illuminated (BSI) 3D IC technology. The chip stack comprises an image sensing tier produced in a 65-nm image sensor technology and a data processing tier in 40-nm CMOS. Using a simple, CMOS-compatible technique, the pixel is capable of passive quenching and active recharge at voltages well above those imposed by a single transistor whilst ensuring that the reliability limits across the gate-source (VGS), gate-drain (VGD) and drain- source (VDS) are not exceeded for any device. For a given technology, the circuit extends the maximum excess bias that SPADs can be operated at when using transistors as quenching elements, thus improving the SPAD sensitivity, timing performance, and photon detection probability uniformity. Implemented with 2.5-V thick oxide transistors and operated at 4.4-V excess bias, the design achieves a timing jitter of 95-ps full-width at half maximum, maximum photon detection efficiency (PDE) of 21.9% at 660 nm and 0.08% afterpulsing probabilitywith a dead time of 8 ns. This is both the lowest afterpulsing probability at 8-ns dead time and the highest peak PDE for a BSI SPAD in a 3D IC technology to date.

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Type
research article
DOI
10.1109/LED.2017.2755989
Author(s)
Lindner, Scott  
Pellegrini, Sara
Henrion, Yann
Rae, Bruce
Wolf, Martin
Charbon, Edoardo
Date Issued

2017-09-22

Publisher

Institute of Electrical and Electronics Engineers

Published in
IEEE Electron Device Letters
Volume

38

Issue

11

Start page

1547

End page

1550

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
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Available on Infoscience
August 13, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/147721
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