Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. A High-PDE, Backside-Illuminated SPAD in 65/40-nm 3D IC CMOS Pixel With Cascoded Passive Quenching and Active Recharge
 
research article

A High-PDE, Backside-Illuminated SPAD in 65/40-nm 3D IC CMOS Pixel With Cascoded Passive Quenching and Active Recharge

Lindner, Scott  
•
Pellegrini, Sara
•
Henrion, Yann
Show more
September 22, 2017
IEEE Electron Device Letters

We present a complete pixel based on a single-photon avalanche diode (SPAD) fabricated in a backside-illuminated (BSI) 3D IC technology. The chip stack comprises an image sensing tier produced in a 65-nm image sensor technology and a data processing tier in 40-nm CMOS. Using a simple, CMOS-compatible technique, the pixel is capable of passive quenching and active recharge at voltages well above those imposed by a single transistor whilst ensuring that the reliability limits across the gate-source (VGS), gate-drain (VGD) and drain- source (VDS) are not exceeded for any device. For a given technology, the circuit extends the maximum excess bias that SPADs can be operated at when using transistors as quenching elements, thus improving the SPAD sensitivity, timing performance, and photon detection probability uniformity. Implemented with 2.5-V thick oxide transistors and operated at 4.4-V excess bias, the design achieves a timing jitter of 95-ps full-width at half maximum, maximum photon detection efficiency (PDE) of 21.9% at 660 nm and 0.08% afterpulsing probabilitywith a dead time of 8 ns. This is both the lowest afterpulsing probability at 8-ns dead time and the highest peak PDE for a BSI SPAD in a 3D IC technology to date.

  • Details
  • Metrics
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés