Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. A CMOS-compatible silicon photonic platform for high-speed integrated opto-electronics
 
conference paper

A CMOS-compatible silicon photonic platform for high-speed integrated opto-electronics

Galland, Christophe  
•
Novack, Ari
•
Liu, Yang
Show more
2013
INTEGRATED PHOTONICS: MATERIALS, DEVICES, AND APPLICATIONS II

We have developed a CMOS-compatible Silicon-on-Insulator photonic platform featuring active components such as p- i-n and photoconductive (MIM) Ge-on-Si detectors, p-i-n ring and Mach-Zehnder modulators, and traveling-wave modulators based on a p-n junction driven by an RF transmission line. We have characterized the yield and uniformity of the performance through automated cross-wafer testing, demonstrating that our process is reliable and scalable. The entire platform is capable of more than 40 GB/s data rate. Fabricated at the IME/A-STAR foundry in Singapore, it is available to the worldwide community through OpSIS, a successful multi-project wafer service based at the University of Delaware. After exposing the design, fabrication and performance of the most advanced platform components, we present our newest results obtained after the first public run. These include low loss passives (Y-junctions: 0.28 dB; waveguide crossings: 0.18 dB and cross-talk -41±2 dB; non-uniform grating couplers: 3.2±0.2 dB). All these components were tested across full 8” wafers and exhibited remarkable uniformity. The active devices were improved from the previous design kit to exhibit 3dB bandwidths ranging from 30 GHz (modulators) to 58 GHz (detectors). We also present new packaging services available to OpSIS users: vertical fiber coupling and edge coupling.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

2013_SPIE_A CMOS-compatible silicon photonic platform for high-speed integrated opto-electronics.pdf

Access type

openaccess

Size

1.33 MB

Format

Adobe PDF

Checksum (MD5)

64406198d4ff70cd3fcf2072a94fd379

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés