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  4. A CMOS-compatible silicon photonic platform for high-speed integrated opto-electronics
 
conference paper

A CMOS-compatible silicon photonic platform for high-speed integrated opto-electronics

Galland, Christophe  
•
Novack, Ari
•
Liu, Yang
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2013
INTEGRATED PHOTONICS: MATERIALS, DEVICES, AND APPLICATIONS II

We have developed a CMOS-compatible Silicon-on-Insulator photonic platform featuring active components such as p- i-n and photoconductive (MIM) Ge-on-Si detectors, p-i-n ring and Mach-Zehnder modulators, and traveling-wave modulators based on a p-n junction driven by an RF transmission line. We have characterized the yield and uniformity of the performance through automated cross-wafer testing, demonstrating that our process is reliable and scalable. The entire platform is capable of more than 40 GB/s data rate. Fabricated at the IME/A-STAR foundry in Singapore, it is available to the worldwide community through OpSIS, a successful multi-project wafer service based at the University of Delaware. After exposing the design, fabrication and performance of the most advanced platform components, we present our newest results obtained after the first public run. These include low loss passives (Y-junctions: 0.28 dB; waveguide crossings: 0.18 dB and cross-talk -41±2 dB; non-uniform grating couplers: 3.2±0.2 dB). All these components were tested across full 8” wafers and exhibited remarkable uniformity. The active devices were improved from the previous design kit to exhibit 3dB bandwidths ranging from 30 GHz (modulators) to 58 GHz (detectors). We also present new packaging services available to OpSIS users: vertical fiber coupling and edge coupling.

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Type
conference paper
DOI
10.1117/12.2017053
Author(s)
Galland, Christophe  
Novack, Ari
Liu, Yang
Ding, Ran
Gould, Michael
Baehr-Jones, Tom
Li, Qi
Yang, Yisu
Ma, Yangjin
Zhang, Yi
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Date Issued

2013

Published in
INTEGRATED PHOTONICS: MATERIALS, DEVICES, AND APPLICATIONS II
Volume

8767

Subjects

Silicon integrated photonics

•

modulator

•

photodetector

•

ring resonator

•

travelling-wave

•

Mach-Zehnder

•

Process Development Kit (PDK)

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GR-GA  
Available on Infoscience
October 25, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/96421
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