Silicon microcantilevers with piezoresistive and MOSFET detection
2009
Details
Title
Silicon microcantilevers with piezoresistive and MOSFET detection
Author(s)
Tosolini, G. ; Villanueva, G. ; Bausells, J. ; García Loureiro, A. ; Iglesias, N. S. ; Aldegunde Rodríguez, M. A. ; Comesana Figueroa, E.
Published in
7th Spanish Conference on Electron Devices (CDE)
Volume
Poster
Pages
428-31
Conference
7th Spanish Conference on Electron Devices (CDE), Santiago de Compostela, Spain, 2009
Date
2009
Laboratories
NEMS
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2013-08-06