Silicon microcantilevers with piezoresistive and MOSFET detection


Published in:
7th Spanish Conference on Electron Devices (CDE), Poster, 428-31
Presented at:
7th Spanish Conference on Electron Devices (CDE), Santiago de Compostela, Spain, 2009
Year:
2009
Laboratories:




 Record created 2013-08-06, last modified 2018-03-17


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