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conference paper
Silicon microcantilevers with piezoresistive and MOSFET detection
2009
7th Spanish Conference on Electron Devices (CDE)
Type
conference paper
Authors
Tosolini, G.
•
•
Bausells, J.
•
GarcÃa Loureiro, A.
•
Iglesias, N. S.
•
Aldegunde RodrÃguez, M. A.
•
Comesana Figueroa, E.
Publication date
2009
Published in
7th Spanish Conference on Electron Devices (CDE)
Volume
Poster
Start page
428
End page
31
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Santiago de Compostela, Spain | 2009 | |
Available on Infoscience
August 6, 2013
Use this identifier to reference this record