Addressable MEMS slit mask for multi-object spectroscopy based on multi-wafer stacking
2011
Abstract
MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated using multiple wafer-level bonding and implemented with individual addressing of each element.
Details
Title
Addressable MEMS slit mask for multi-object spectroscopy based on multi-wafer stacking
Author(s)
Canonica, Michael ; Noell, Wilfried ; de Rooij, Nico ; Zamkotsian, Frederic ; Lanzoni, Patrick
Published in
Omn2011: 16Th International Conference On Optical Mems And Nanophotonics
Pages
129-130
Conference
16th International Conference on Optical MEMS and Nanophotonics (OMN), Istanbul, Turquie, Aug 08-11, 2011
Date
2011
Publisher
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
ISBN
978-1-4577-0336-2
Keywords
Other identifier(s)
View record in Web of Science
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2012-06-12