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conference paper
Addressable MEMS slit mask for multi-object spectroscopy based on multi-wafer stacking
2011
Omn2011: 16Th International Conference On Optical Mems And Nanophotonics
MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated using multiple wafer-level bonding and implemented with individual addressing of each element.
Type
conference paper
Web of Science ID
WOS:000297850100053
Authors
Publication date
2011
Published in
Omn2011: 16Th International Conference On Optical Mems And Nanophotonics
ISBN of the book
978-1-4577-0336-2
Start page
129
End page
130
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Istanbul, Turquie | Aug 08-11, 2011 | |
Available on Infoscience
June 12, 2012
Use this identifier to reference this record