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  4. Dynamically deformable reflective membrane for laser beam shaping and smoothing
 
conference paper

Dynamically deformable reflective membrane for laser beam shaping and smoothing

Masson, J.  
•
Bitterli, R.  
•
Bich, A.
Show more
2012
Moems And Miniaturized Systems Xi
Conference on MOEMS and Miniaturized Systems XI

We show a laser beam shaping device made of a deformable continuous reflective membrane fabricated over a scanning stage. The combination of two actuator schemes enables shaping and smoothing of a laser beam with a unique compact device. It is designed to shape an input laser beam into a flat top or Gaussian intensity profile, to support high optical load and to potentially reduce speckle contrast. One single electrode is needed to deform the whole membrane into multiple sub-reflecting concave elements. The scanning stage is used simultaneously to smooth out the remaining interference patterns. The fabrication process is based on SOI wafer and parylene refilling to enable the fabrication of a 100 % fill factor 5 by 5 mm(2) deformable membrane. Applications for such device are laser machining and laser display.

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Type
conference paper
DOI
10.1117/12.909092
Web of Science ID

WOS:000302688500016

Author(s)
Masson, J.  
Bitterli, R.  
Bich, A.
Noell, W.  
Voelkel, R.
Weible, K.
de Rooij, N.  
Date Issued

2012

Publisher

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa

Published in
Moems And Miniaturized Systems Xi
ISBN of the book

978-0-8194-8895-4

Series title/Series vol.

Proceedings of SPIE; 8252

Start page

82520K

Subjects

Beam shaping

•

micromirror

•

diffuser

•

flat top

•

Mems

•

parylene

•

System

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
Conference on MOEMS and Miniaturized Systems XI

San Francisco, CA

Jan 24-25, 2012

Available on Infoscience
May 11, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/80266
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