Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Dynamically deformable reflective membrane for laser beam shaping and smoothing
 
conference paper

Dynamically deformable reflective membrane for laser beam shaping and smoothing

Masson, J.  
•
Bitterli, R.  
•
Bich, A.
Show more
2012
Moems And Miniaturized Systems Xi
Conference on MOEMS and Miniaturized Systems XI

We show a laser beam shaping device made of a deformable continuous reflective membrane fabricated over a scanning stage. The combination of two actuator schemes enables shaping and smoothing of a laser beam with a unique compact device. It is designed to shape an input laser beam into a flat top or Gaussian intensity profile, to support high optical load and to potentially reduce speckle contrast. One single electrode is needed to deform the whole membrane into multiple sub-reflecting concave elements. The scanning stage is used simultaneously to smooth out the remaining interference patterns. The fabrication process is based on SOI wafer and parylene refilling to enable the fabrication of a 100 % fill factor 5 by 5 mm(2) deformable membrane. Applications for such device are laser machining and laser display.

  • Details
  • Metrics
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés