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  4. Small signal analysis of electrically-stressed oxides with Poisson-Schroedinger based multiphonon capture model
 
conference paper

Small signal analysis of electrically-stressed oxides with Poisson-Schroedinger based multiphonon capture model

Garetto, Davide  
•
Randriamihaja, Yoann Mamy
•
Rideau, Denis
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2010
Proceedings of the 14th International Workshop on Computational Electronics (IWCE)
14th International Workshop on Computational Electronics (IWCE)

Defects in MOSFET oxides are a major issue in CMOS technologies, affecting not only the device electrical performances but also compromising reliability and endurance. Using Charge-Pumping and C-V measurements, defects have been characterized in native and electrically-aged oxides. These electrical measurements have been compared to the predictions of advanced simulations, accounting for multi-phonon assisted emission/capture rates and including the presence of multiple defects and the contribution of electron and holes tunneling from both the gate and the channel. The proposed model allows an accurate description of the dynamics of trap occupation during electrical stress and can be used for the rigorous extraction of trap concentration from CV measurements.

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Type
conference paper
DOI
10.1109/IWCE.2010.5677950
Author(s)
Garetto, Davide  
Randriamihaja, Yoann Mamy
Rideau, Denis
Dornel, Erwan
Clark, William F.
Schmid, Alexandre  
Huard, Vincent
Jaouen, Herve
Leblebici, Yusuf  
Date Issued

2010

Publisher

IEEE Service Center

Publisher place

Piscataway, NJ, USA

Published in
Proceedings of the 14th International Workshop on Computational Electronics (IWCE)
Start page

327

End page

330

Subjects

Induced Leakage Current

•

Semiconductors

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LSM  
Event nameEvent placeEvent date
14th International Workshop on Computational Electronics (IWCE)

Pisa, Italy

Oct 26-29, 2010

Available on Infoscience
October 31, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/72114
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