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conference paper

A magnetically actuated MEMS scanning mirror

Burr, G.W.
•
Tai, Y.C.
•
Psaltis, D. 
more
1996
Miniaturized Systems With Micro-Optics And Micromechanics
Conference on Miniaturized Systems with Micro-Optics and Micromechanics
Type
conference paper
DOI
10.1117/12.234635
Web of Science ID

WOS:A1996BF18M00006

Authors
Burr, G.W.
•
Tai, Y.C.
•
Psaltis, D. 
•
Miller, R.A.
Publication date

1996

Publisher

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010

Published in
Miniaturized Systems With Micro-Optics And Micromechanics
Series title/Series vol.

Proceedings Of The Society Of Photo-Optical Instrumentation Engineers (Spie); 2687

Start page

47

End page

52

Subjects

Mems

magnetic

scanning mirror

holographic memory

Peer reviewed

REVIEWED

EPFL units
LO 
Event nameEvent placeEvent date
Conference on Miniaturized Systems with Micro-Optics and Micromechanics

SAN JOSE, CA

Jan 30-31, 1996

Available on Infoscience
November 25, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/58895