conference paper
A magnetically actuated MEMS scanning mirror
1996
Miniaturized Systems With Micro-Optics And Micromechanics
Cite this item
Burr, G. W., Tai, Y. C., Psaltis, D., & Miller, R. A. (1996). A magnetically actuated MEMS scanning mirror. Miniaturized Systems with Micro-Optics and Micromechanics, Proceedings of the Society of Photo-Optical Instrumentation Engineers (Spie); 2687, 47–52. https://doi.org/10.1117/12.234635
Click Copy to copy the citation, or select the text manually.
Type
conference paper
Web of Science ID
WOS:A1996BF18M00006
Author(s)
Date Issued
1996
Published in
Miniaturized Systems With Micro-Optics And Micromechanics
Series title/Series vol.
Proceedings Of The Society Of Photo-Optical Instrumentation Engineers (Spie); 2687
Start page
47
End page
52
Subjects
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
| Event name | Event place | Event date |
SAN JOSE, CA | Jan 30-31, 1996 | |
Available on Infoscience
November 25, 2010
Use this identifier to reference this record