Details
Title
A magnetically actuated MEMS scanning mirror
Author(s)
Burr, G.W. ; Tai, Y.C. ; Psaltis, D. ; Miller, R.A.
Published in
Miniaturized Systems With Micro-Optics And Micromechanics
Series
Proceedings Of The Society Of Photo-Optical Instrumentation Engineers (Spie), 2687
Pages
47-52
Conference
Conference on Miniaturized Systems with Micro-Optics and Micromechanics, SAN JOSE, CA, Jan 30-31, 1996
Date
1996
Publisher
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010
Keywords
Other identifier(s)
View record in Web of Science
Laboratories
LO
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LO - Optics Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2010-11-25