CVD deposited TA2O5 and HfO2 layers as pH-sensitive layers for ISFETs

conference paper

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•

Mondin, G.

2006

IMCS The 11th International Meeting on Chemical Sensors

Type

conference paper

Authors

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Mondin, G.

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Jenny, S.

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Jeanneret, S.

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Millon, C.

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Roussel, H.

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Dubourdieu, C.

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Publication date

2006

Published in

IMCS The 11th International Meeting on Chemical Sensors

Peer reviewed

NON-REVIEWED

EPFL units

Available on Infoscience

May 12, 2009

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