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Vertically Buckled Bridges for Three-Dimensional SOI-MEMS

Sasaki, M. ; Briand, D. ; Noell, W. ; de Rooij, N. F.

Published in:
2003 International Conference on Solid State Devices and Materials, 696-697
Year:
2003
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-03-17


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