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> Vertically Buckled Bridges for Three-Dimensional SOI-MEMS
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Vertically Buckled Bridges for Three-Dimensional SOI-MEMS
Sasaki, M.
;
Briand, D.
;
Noell, W.
;
de Rooij, N. F.
Published in:
2003 International Conference on Solid State Devices and Materials, 696-697
Year:
2003
Laboratories:
SAMLAB
Record appears in:
Scientific production and competences
>
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STI - School of Engineering
>
SAMLAB - Sensors, Actuators and Microsystems Laboratory
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Record created 2009-05-12, last modified 2018-03-17
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