Infoscience

Conference paper

Vertically Buckled Bridges for Three-Dimensional SOI-MEMS

Sasaki, M.; Briand, D.; Noell, W.; de Rooij, N. F.
  • Published in: 2003 International Conference on Solid State Devices and Materials, p. 696-697
  • Publication date: 2003

    Reference

    • SAMLAB-CONF-2003-041

    Record created on 2009-05-12, modified on 2016-08-08

Fulltext

  • There is no available fulltext. Please contact the lab or the authors.

Related material

Contacts

EPFL authors