Vertically Buckled Bridges for Three-Dimensional SOI-MEMS
2003
Details
Title
Vertically Buckled Bridges for Three-Dimensional SOI-MEMS
Author(s)
Sasaki, M. ; Briand, D. ; Noell, W. ; de Rooij, N. F.
Published in
2003 International Conference on Solid State Devices and Materials
Pages
696-697
Date
2003
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12