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conference paper
Parallel scanning AFM with on-hip circuitry in CMOS technology
1999
12th IEEE International Conference On MEMS'99
Type
conference paper
Authors
Lange, D.
•
•
Hagleitner, C.
•
Tonin, A.
•
Hidber, H.-R.
•
Niedermann, P.
•
Staufer, U.
•
•
Brand, O.
•
Baltes, H.
Publication date
1999
Published in
12th IEEE International Conference On MEMS'99
Start page
447
End page
452
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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