conference paper
Parallel scanning AFM with on-hip circuitry in CMOS technology
1999
12th IEEE International Conference On MEMS'99
Cite this item
Lange, D., Akiyama, T., Hagleitner, C., Tonin, A., Hidber, H.-R., Niedermann, P., Staufer, U., de Rooij, N. F., Brand, O., & Baltes, H. (1999). Parallel scanning AFM with on-hip circuitry in CMOS technology. 12th IEEE International Conference on MEMS′99, 447–452. https://doi.org/10.1109/MEMSYS.1999.746870
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Type
conference paper
Author(s)
Lange, D.
Hagleitner, C.
Tonin, A.
Hidber, H.-R.
Niedermann, P.
Staufer, U.
Brand, O.
Baltes, H.
Date Issued
1999
Published in
12th IEEE International Conference On MEMS'99
Start page
447
End page
452
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
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Available on Infoscience
May 12, 2009
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