A high insulating thin film ZnO piezoelectric actuator on a Polyimide substrate
2002
Details
Title
A high insulating thin film ZnO piezoelectric actuator on a Polyimide substrate
Author(s)
Kuoni, A. ; Quinche, C. ; Boillat, M. ; Keppner, H. ; de Rooij, N. F.
Published in
The 16th European Conference on Solid-State Transducers
Date
2002
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12