A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications


Published in:
PowerMEMS 2008, 269-272
Presented at:
PowerMEMS 2008 + MicroEMS 2008, Sendai, November 9-12, 2008
Year:
2008
Laboratories:




 Record created 2009-05-12, last modified 2018-01-28


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