Establishment of a technology platform for epitaxial piezoelectric MEMS


Published in:
Proceedings of 22nd International Conference Eurosensors, 1, 819-822
Presented at:
Eurosensors XXII, Dresden, Germany , September 7-10, 2008
Year:
2008
Laboratories:




 Record created 2009-05-12, last modified 2018-09-13


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