Surface-micromachined Ta-Si-N beams for use in micromechanics
1998
Details
Title
Surface-micromachined Ta-Si-N beams for use in micromechanics
Author(s)
Grétillat, M.-A. ; Linder, C. ; Dommann, A. ; Staufert, G. ; de Rooij, N. F. ; Nicolet, M.-A.
Published in
Journal of Micromechanics and Microengineering
Volume
8
Issue
2
Pages
88-90
Date
1998
Note
183
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12