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conference paper
Metal to Glass Anodic Bonding for Microsystems Packaging
2003
Transducers03
Type
conference paper
Authors
Publication date
2003
Published in
Transducers03
Volume
2
Start page
1824
End page
1827
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record