Modulated submicron gratings
1994
Details
Title
Modulated submicron gratings
Author(s)
Herzig, H. P. ; Ehbets, P. ; Nussbaum, P. ; Dändliker, R. ; Clube, F. S. M. ; Gray, S. ; Tisserand, J. C.
Published in
International Conference on Optical Metrology and Nanontechnology
Series
EOS Topical Meetings Digests Series Volume 4
Pages
62-63
Date
1994
Publisher
Paul Scherrer Institute, Zurich, Switzerland
Laboratories
OPT