Infoscience

Conference paper

Modulated submicron gratings

Herzig, H. P.; Ehbets, P.; Nussbaum, P.; Dändliker, R.; Clube, F. S. M.; Gray, S.; Tisserand, J. C.
  • Published in: International Conference on Optical Metrology and Nanontechnology, p. 62-63
  • Series: EOS Topical Meetings Digests Series Volume 4
  • Paul Scherrer Institute, Zurich, Switzerland, 1994

    Reference

    • OPT-CONF-1994-009

    Record created on 2009-04-22, modified on 2017-05-10

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