Modulated submicron gratings
Herzig, H. P.; Ehbets, P.; Nussbaum, P.; Dändliker, R.; Clube, F. S. M.; Gray, S.; Tisserand, J. C.
1994

Details

Title Modulated submicron gratings
Author(s) Herzig, H. P. ; Ehbets, P. ; Nussbaum, P. ; Dändliker, R. ; Clube, F. S. M. ; Gray, S. ; Tisserand, J. C.
Published in International Conference on Optical Metrology and Nanontechnology
Series EOS Topical Meetings Digests Series Volume 4
Pages 62-63
Date 1994
Publisher Paul Scherrer Institute, Zurich, Switzerland
Laboratories OPT
Record Appears in Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published

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