conference paper
Modulated submicron gratings
1994
International Conference on Optical Metrology and Nanontechnology
Type
conference paper
Author(s)
Date Issued
1994
Published in
International Conference on Optical Metrology and Nanontechnology
Series title/Series vol.
EOS Topical Meetings Digests Series Volume 4
Start page
62
End page
63
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record