Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions
2008
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Details
Title
Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions
Author(s)
Savu, V. ; Brugger, J. ; Kivioja, J. ; Ahopelto, J.
Published in
Applied Superconductivity Conference 2008 (ASC 2008)
Conference
Applied Superconductivity Conference 2008 (ASC 2008), Chicago, Illinois USA, August 17-22 2008
Date
2008
Other identifier(s)
View record in Web of Science
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-03-02