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research article
Global visualization of powder trapping in capacitive RF plasmas by two-dimensional laser scattering
Understanding particle dynamics requires comparison of spatially resolved measurements with two-dimensional (2-D) simulations, In this work, a cross section of a capacitive discharge is illuminated with an expanded laser beam, and global scattered light is recorded by camera, Plasma equipotentials are visualized using the scattered intensity from a small amount of particles trapped in an argon plasma. At low RF voltages, good agreement is found with 2-D fluid simulations, whereas displacement of the power clouds toward the sheaths is observed at high voltage.
Type
research article
Web of Science ID
WOS:A1996UE71800050
Authors
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•
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Courteille, C.
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Schwarzenbach, W.
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Merad, A.
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Boeuf, J. P.
Publication date
1996
Published in
Volume
24
Issue
1
Start page
101
End page
102
Peer reviewed
REVIEWED
Available on Infoscience
April 16, 2008
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