Global visualization of powder trapping in capacitive RF plasmas by two-dimensional laser scattering
Understanding particle dynamics requires comparison of spatially resolved measurements with two-dimensional (2-D) simulations, In this work, a cross section of a capacitive discharge is illuminated with an expanded laser beam, and global scattered light is recorded by camera, Plasma equipotentials are visualized using the scattered intensity from a small amount of particles trapped in an argon plasma. At low RF voltages, good agreement is found with 2-D fluid simulations, whereas displacement of the power clouds toward the sheaths is observed at high voltage.
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Dorier, J. L., Hollenstein, C., Howling, A. A., Courteille, C., Schwarzenbach, W., Merad, A., & Boeuf, J. P. (1996). Global visualization of powder trapping in capacitive RF plasmas by two-dimensional laser scattering. Ieee Transactions on Plasma Science, 24(1), 101–102. https://doi.org/10.1109/27.491732
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WOS:A1996UE71800050
1996
24
1
101
102
REVIEWED
EPFL