Global visualization of powder trapping in capacitive RF plasmas by two-dimensional laser scattering

Understanding particle dynamics requires comparison of spatially resolved measurements with two-dimensional (2-D) simulations, In this work, a cross section of a capacitive discharge is illuminated with an expanded laser beam, and global scattered light is recorded by camera, Plasma equipotentials are visualized using the scattered intensity from a small amount of particles trapped in an argon plasma. At low RF voltages, good agreement is found with 2-D fluid simulations, whereas displacement of the power clouds toward the sheaths is observed at high voltage.


Published in:
Ieee Transactions on Plasma Science, 24, 1, 101-102
Year:
1996
ISSN:
0093-3813
ISBN:
0093-3813
Laboratories:
SPC
CRPP




 Record created 2008-04-16, last modified 2018-01-28


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