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research article
Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals
Type
research article
Web of Science ID
WOS:000251795200028
Authors
Publication date
2007
Published in
Volume
19
Issue
4
Start page
407
End page
411
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
April 11, 2008
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