research article
Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals
Type
research article
Web of Science ID
WOS:000251795200028
Author(s)
Date Issued
2007
Published in
Volume
19
Issue
4
Start page
407
End page
411
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
April 11, 2008
Use this identifier to reference this record