Etching of sub-micrometer structures through Stencil


Published in:
Microelectronic Engineering Journal
Presented at:
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark, Copenhagen, Denmark, 23-26 Sept, 2007
Year:
2007
Publisher:
Elsevier
Laboratories:




 Record created 2007-11-07, last modified 2018-03-18

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