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research article
Raman spectroscopy of sputtered AlN films: E-2(high) biaxial strain dependence
Type
research article
Web of Science ID
WOS:000239690800036
Authors
Publication date
2006
Published in
Volume
89
Issue
6
Article Number
061905
Note
061905
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 18, 2007
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