research article
Raman spectroscopy of sputtered AlN films: E-2(high) biaxial strain dependence
Cite this item
Trodahl, H. J., Martin, F., Muralt, P., & Setter, N. (2006). Raman spectroscopy of sputtered AlN films: E-2(high) biaxial strain dependence. Applied Physics Letters, 89(6), Article 061905. https://doi.org/10.1063/1.2335582
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Type
research article
Web of Science ID
WOS:000239690800036
Author(s)
Date Issued
2006
Published in
Volume
89
Issue
6
Article Number
061905
Note
061905
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 18, 2007
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