Electron-Cyclotron Resonance Plasma-Experiment for Insitu Surface Modification, Deposition, and Analysis
1992
Details
Title
Electron-Cyclotron Resonance Plasma-Experiment for Insitu Surface Modification, Deposition, and Analysis
Author(s)
Nowak, S. ; Groning, P. ; Kuttel, O. M. ; Collaud, M. ; Dietler, G.
Published in
Journal of Vacuum Science & Technology a : Vacuum Surfaces and Films
Volume
10
Issue
6
Pages
3419-3425
Date
1992
Laboratories
LPMV
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SB Archives > LPMV - Laboratory of the Physics of Living Matter
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-06-20