research article

Electron-Cyclotron Resonance Plasma-Experiment for Insitu Surface Modification, Deposition, and Analysis

Nowak, S.
•
Groning, P.
•
Kuttel, O. M.
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1992
Journal of Vacuum Science & Technology a : Vacuum Surfaces and Films
Type
research article
DOI
10.1116/1.577795
Author(s)
Nowak, S.
Groning, P.
Kuttel, O. M.
Collaud, M.
Dietler, G.  
Date Issued

1992

Published in
Journal of Vacuum Science & Technology a : Vacuum Surfaces and Films
Volume

10

Issue

6

Start page

3419

End page

3425

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPMV  
Available on Infoscience
June 20, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/9024