Loading...
conference paper
Polyimide sacrificial layer process for SOI SG-MOSFET pressure sensor
2005
31st International Conference on Micro- and Nano-Engineering
Type
conference paper
Authors
Publication date
2005
Published in
31st International Conference on Micro- and Nano-Engineering
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Vienna, Austria | September 19-22, 2005 | |
Available on Infoscience
May 16, 2007
Use this identifier to reference this record