conference paper
Polyimide sacrificial layer process for SOI SG-MOSFET pressure sensor
2005
31st International Conference on Micro- and Nano-Engineering
Type
conference paper
Author(s)
Date Issued
2005
Published in
31st International Conference on Micro- and Nano-Engineering
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Vienna, Austria | September 19-22, 2005 | |
Available on Infoscience
May 16, 2007
Use this identifier to reference this record