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  4. Theoretical and experimental limits of quantitative analysis of strain and chemistry of inGasAs/GaAs layers using (200) dark-fiel TEM imaging
 
research article

Theoretical and experimental limits of quantitative analysis of strain and chemistry of inGasAs/GaAs layers using (200) dark-fiel TEM imaging

Cagnon, J.
•
Buffat, P. A.  
•
Stadelmann, P. A.  
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2003
Inst. Phys. Conf. Ser.
  • Details
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Type
research article
Author(s)
Cagnon, J.
Buffat, P. A.  
Stadelmann, P. A.  
Leifer, K.  
Date Issued

2003

Published in
Inst. Phys. Conf. Ser.
Volume

180

Start page

203

End page

206

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CIME  
Available on Infoscience
February 15, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/3061
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