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  4. Theoretical and experimental limits of quantitative analysis of strain and chemistry of inGasAs/GaAs layers using (200) dark-fiel TEM imaging
 
research article

Theoretical and experimental limits of quantitative analysis of strain and chemistry of inGasAs/GaAs layers using (200) dark-fiel TEM imaging

Cagnon, J.
•
Buffat, P. A.  
•
Stadelmann, P. A.  
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2003
Inst. Phys. Conf. Ser.
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