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research article
Corner Effect and Local Volume Inversion in SiNW FETs
In this paper, a quantitative study of the corner effect and of the local volume inversion on gate-all-around MOSFETs based on numerical simulations has been carried out; different angles and doping levels are compared, in order to understand the impact of the corner regions on the total current. A method for the extraction of the threshold voltage and of the subthreshold slope of the corner region has been proposed, and the resulting values have been analyzed in order to understand their effects on the device characteristics.
Type
research article
Web of Science ID
WOS:000292966400023
Authors
Publication date
2011
Published in
Volume
10
Start page
810
End page
816
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
December 16, 2011
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