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research article

Corner Effect and Local Volume Inversion in SiNW FETs

De Michielis, Luca  
•
Moselund, Kirsten Emilie  
•
Selmi, Luca
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2011
Ieee Transactions On Nanotechnology

In this paper, a quantitative study of the corner effect and of the local volume inversion on gate-all-around MOSFETs based on numerical simulations has been carried out; different angles and doping levels are compared, in order to understand the impact of the corner regions on the total current. A method for the extraction of the threshold voltage and of the subthreshold slope of the corner region has been proposed, and the resulting values have been analyzed in order to understand their effects on the device characteristics.

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Type
research article
DOI
10.1109/TNANO.2010.2080284
Web of Science ID

WOS:000292966400023

Author(s)
De Michielis, Luca  
Moselund, Kirsten Emilie  
Selmi, Luca
Ionescu, Adrian Mihai  
Date Issued

2011

Publisher

Institute of Electrical and Electronics Engineers

Published in
Ieee Transactions On Nanotechnology
Volume

10

Start page

810

End page

816

Subjects

Corner effect

•

local volume inversion

•

multigate MOSFET

•

silicon nanowire (SiNW)

•

Gate Soi Mosfets

•

Silicon

•

Fabrication

•

Transistor

•

SiNW

•

Nanowires

•

GAA MOSFET

•

Gate-All-Around

•

FP7 NANOSIL NoE

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/73812
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